Effect of equalizing groove on small vibration of aerostatic bearings

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Effect of equalizing groove on small vibration of aerostatic bearings
	Chen Q. ; Chen B. ; Cai L.-M.
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2014
卷号	22 期号:12 页码:3354-3359
ISSN号	ISBN/1004924X
英文摘要	As the very small vibration of an aerostatic bearing limits its applications in ultra-precision machining, this paper analyzes experimentally the dynamical characteristics of the aerostatic bearing and proposes a structure design with an equalizing groove to solve the problem mentioned above. To realize the mechanical characteristics of aerostatic bearings, the analytical model was set up by using the finite element analysis software FLUENT and the performance parameters of the aerostatic bearing were obtained. The mechanism for the occurrence of small vibration was analyzed and the methods to add an equalizing groove on the surface of the aerostatic bearing to reduce the small vibration were proposed. The experiments were performed to verify the proposed method and the results show that the experiment results are good consistent with the analysis results. It indicates that the small vibration can be successfully suppressed by 80% with the proposed equalizing groove, which improves the stability and operation accuracy of the aerostatic bearing and is a useful exploring for suppressing the small vibration of aerostatic bearings and improving the accuracy of whole machine tool.
收录类别	EI
语种	中文
公开日期	2015-05-27
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/43926]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen Q.,Chen B.,Cai L.-M.. Effect of equalizing groove on small vibration of aerostatic bearings[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2014,22(12):3354-3359.
APA	Chen Q.,Chen B.,&Cai L.-M..(2014).Effect of equalizing groove on small vibration of aerostatic bearings.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,22(12),3354-3359.
MLA	Chen Q.,et al."Effect of equalizing groove on small vibration of aerostatic bearings".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 22.12(2014):3354-3359.