Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens
	Peng H.-F. ; Sun Z.
刊名	Guangzi Xuebao/Acta Photonica Sinica
	2014
卷号	43 期号:4
ISSN号	ISBN/10044213
英文摘要	The combination of flexure and PZT actuator is a significant method to achieve precision adjustment. A precision adjusting mechanism with flexure hinges was introduced and theoretical calculations were carried out to get the working principle of it. The optimization design and finite element analysis were also taken to acquire the axial stiffness of a typical opto-mechanic structure. The results show that the maximum axial displacement of the optics can be bigger than 200 m under the yield limit of the material. Secondly, a modal analysis is taken to obtain the natural frequency of the mechanism. The results indicated that the first resonant frequency of the structure is 185.1 Hz. It can be seen that the natural frequency can satisfy the work specification of the lithographic lens. At last, the influence of the applied force of the PZT to the surface figure of an optical element was obtained. The result shows that the influence of the force F=14N to the RMS of the optic element is 4.41 nm. All these results provide useful evidences for the applyment of this mechanism for optic adjusting.
收录类别	EI
语种	中文
公开日期	2015-05-27
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/43831]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Peng H.-F.,Sun Z.. Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens[J]. Guangzi Xuebao/Acta Photonica Sinica,2014,43(4).
APA	Peng H.-F.,&Sun Z..(2014).Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens.Guangzi Xuebao/Acta Photonica Sinica,43(4).
MLA	Peng H.-F.,et al."Design and analysis of a precision axial adjusting mechanism for optical elements in lithographic lens".Guangzi Xuebao/Acta Photonica Sinica 43.4(2014).