Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system

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	Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system
	Zhang, C ; Wang, KG ; Wang, S ; Liu, Y ; Zhao, W ; Chen, XM ; Lu, BL ; Gu, CZ ; Sun, Y ; Wang, GR ; Bai, JT
刊名	JOURNAL OF OPTICS
	2014
卷号	16 期号:12
关键词	donut-shaped multiple aberrations vector diffraction theory focusing system nano-pattern
ISSN号	2040-8978
通讯作者	Zhang, C (reprint author), NW Univ Xian, Inst Photon & Photon Technol, Xian 710069, Peoples R China.
中文摘要	A donut-shaped laser that is simultaneously impacted by the coma, astigmatism and spherical aberrations in a high NA focusing system is numerically simulated based on the vectorial diffraction theory. The full-width half-maximum, intensity characters, and dimensions of the dark cores of the donut-shaped laser on the focal plane are quantitatively analyzed. The results are highly consistent with the annular-shaped nano-patterns that are experimentally fabricated by our purpose-built laser direct writing system. The mechanism of asymmetric nano-patterns fabricated through laser writing lithography is also revealed.
资助信息	Major Research Plan of the Natural Science Foundation of China [91123030, 61378083]; International Science & Technology Cooperation Program of China [2011DFA12220]; NSF's MRI, USA [CBET-1040227]
语种	英语
公开日期	2015-04-14
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/59241]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zhang, C,Wang, KG,Wang, S,et al. Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system[J]. JOURNAL OF OPTICS,2014,16(12).
APA	Zhang, C.,Wang, KG.,Wang, S.,Liu, Y.,Zhao, W.,...&Bai, JT.(2014).Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system.JOURNAL OF OPTICS,16(12).
MLA	Zhang, C,et al."Multiple primary aberrations effect on donut-shaped laser beam in high NA focusing system".JOURNAL OF OPTICS 16.12(2014).