IC装备控制系统平台技术研究 | |
刘明哲![]() ![]() ![]() | |
2008 | |
会议名称 | 7th World Congress on Intelligent Control and Automation |
会议日期 | June 25-27, 2008 |
会议地点 | Chongqing, China |
关键词 | 集成电路 控制系统 半导体 SEMI标准 |
其他题名 | Research of Control System Platform Technology for IC Equipment |
页码 | 7393-7397 |
中文摘要 | 半导体集成电路的生产制造向300mm晶圆的方向发展,IC装备控制系统不但要完成设备自身的任务调度、物料传输、工艺控制,还要考虑企业级的信息集成、生产调度和行业标准。本文分析了半导体制造流程和控制需求,提出了一种框架式、模块化的IC 装备控制系统平台模型,旨在完成系统的控制功能的同时,使得半导体设备的控制具有更大的灵活性、伸缩性、企业级交互能力,并符合行业标准。 |
英文摘要 | With the development of road to 300mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards. |
收录类别 | EI ; CPCI(ISTP) |
产权排序 | 1 |
会议主办者 | Chongqing Univ, Chongqing Inst Technol, Chongqing Univ Sci & Technol, Xihua Univ, SW Univ Sci & Technol, IEEE Robot & Automat Soc, IEEE Control Syst Soc, Beijing Chapter, Chinese Assoc Automat, Chinese Assoc Artificial Intell, Natl Nat Sci Fdn, Chongqing Municipal Sci & Technol Comm, Chongqing Municipal Assoc Sci & Technol, KC Wong Educ Fdn |
会议录 | 2008 7TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION, VOLS 1-23
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会议录出版者 | IEEE |
会议录出版地 | NEW YORK |
语种 | 中文 |
ISBN号 | 978-1-4244-2113-8 |
WOS记录号 | WOS:000259965706007 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/8093] ![]() |
专题 | 沈阳自动化研究所_工业信息学研究室_工业控制系统研究室 |
推荐引用方式 GB/T 7714 | 刘明哲,徐皑冬,于海斌,等. IC装备控制系统平台技术研究[C]. 见:7th World Congress on Intelligent Control and Automation. Chongqing, China. June 25-27, 2008. |
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