Competitive growth mechanisms of AlN on Si (111) by MOVPE

	Competitive growth mechanisms of AlN on Si (111) by MOVPE
	Feng, YX ; Wei, HY ; Yang, SY ; Chen, Z ; Wang, LS ; Kong, SS ; Zhao, GJ ; Liu, XL
刊名	scientific reports
	2014
卷号	4 页码:6416
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2015-03-25
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/26198]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Feng, YX,Wei, HY,Yang, SY,et al. Competitive growth mechanisms of AlN on Si (111) by MOVPE[J]. scientific reports,2014,4:6416.
APA	Feng, YX.,Wei, HY.,Yang, SY.,Chen, Z.,Wang, LS.,...&Liu, XL.(2014).Competitive growth mechanisms of AlN on Si (111) by MOVPE.scientific reports,4,6416.
MLA	Feng, YX,et al."Competitive growth mechanisms of AlN on Si (111) by MOVPE".scientific reports 4(2014):6416.