Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride

	Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride
	Wang, Zhiguo ; Li, Jingbo ; Fu, Yong Qing
刊名	applied physics express
	2014
卷号	7 期号:11 页码:111004
学科主题	半导体物理
收录类别	SCI
语种	英语
公开日期	2015-03-20
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/26087]
专题	半导体研究所_半导体超晶格国家重点实验室
推荐引用方式 GB/T 7714	Wang, Zhiguo,Li, Jingbo,Fu, Yong Qing. Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride[J]. applied physics express,2014,7(11):111004.
APA	Wang, Zhiguo,Li, Jingbo,&Fu, Yong Qing.(2014).Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride.applied physics express,7(11),111004.
MLA	Wang, Zhiguo,et al."Effective n-type doping strategy through codoping Si-Al-F-N in aluminum nitride".applied physics express 7.11(2014):111004.