Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens

CORC > 上海应用物理研究所 > 中国科学院上海应用物理研究所 > 中科院上海应用物理研究所2011-2017年

	Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens
	Huang Qiu-Shi ; Li Hao-Chuan ; Song Zhu-Qing ; Zhu Jing-Tao ; Wang Zhan-Shan ; Li Ai-Guo（李爱国） ; Yan Shuai（闫帅） ; Mao Cheng-Wen（毛成文） ; Wang Hua（王华） ; Yan Fen（闫芬） ; Zhang Ling ; Yu Xiao-Han（余笑寒） ; Liu Peng ; Li Ming
刊名	CHINESE PHYSICS C
	2013
卷号	37 期号:2
ISSN号	1674-1137
英文摘要	The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 mu m-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 mu m. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.
收录类别	SCI
语种	英语
WOS记录号	WOS:000320547600018
公开日期	2014-06-13
内容类型	期刊论文
源URL	[http://ir.sinap.ac.cn/handle/331007/13764]
专题	上海应用物理研究所_中科院上海应用物理研究所2011-2017年
推荐引用方式 GB/T 7714	Huang Qiu-Shi,Li Hao-Chuan,Song Zhu-Qing,et al. Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens[J]. CHINESE PHYSICS C,2013,37(2).
APA	Huang Qiu-Shi.,Li Hao-Chuan.,Song Zhu-Qing.,Zhu Jing-Tao.,Wang Zhan-Shan.,...&Li Ming.(2013).Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens.CHINESE PHYSICS C,37(2).
MLA	Huang Qiu-Shi,et al."Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens".CHINESE PHYSICS C 37.2(2013).