Design and manufacture of micro interference system in spatial modulation fourier transform spectrometer

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出 > 会议论文

	Design and manufacture of micro interference system in spatial modulation fourier transform spectrometer
	Lv J. ; Liang J. ; Liang Z. ; Qin Y. ; Tian C. ; Wang W.
	2013
会议名称	14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012, November 4, 2012 - November 7, 2012
会议地点	Hangzhou, China
页码	973-978
英文摘要	Spatial modulation Fourier transform spectrometer(FTS) based on micro step mirror arrays with high optical path difference sampling precision was a new high-tech measuring instrument. To depress the interferogram aliasing resulted from the chromatic dispersion of beam splitter, considering interferogram contrast reversal as the criterion of image degradation, the thickness difference between beam splitter and compensating plate was determined smaller than 0.2m. So as to restrain the ghost images induced by secondary reflection on the surface of beam splitter, the transmittance of anti-reflection film should be more than 98% and the transmittance of beam splitter film should be controlled within (505) %. Since the restriction of processing method and machining accuracy to micro step mirrors, the thickness deviation and angle deviation existed between various sub-mirrors. After the error synthesis to sub-mirror errors using Monte Carlo method, the tolerance of the thickness deviation and angle deviation was controlled in 1m and 210 -5rad. Meanwhile, the step height deviation of micro step mirrors may induce non uniform sampling to interference signal. Thus a spectrum method by least-squares cosines progression arithmetic was advanced and the validity of which was demonstrated well. 2013 Trans Tech Publications Ltd, Switzerland.
收录类别	EI
会议录	14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012, November 4, 2012 - November 7, 2012
会议录出版者	Trans Tech Publications Ltd
会议录出版地	Hangzhou, China
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/41017]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Lv J.,Liang J.,Liang Z.,et al. Design and manufacture of micro interference system in spatial modulation fourier transform spectrometer[C]. 见:14th Annual Conference and the 3rd International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2012, November 4, 2012 - November 7, 2012. Hangzhou, China.