Characterization of interfacial layer of DUV coatings by spectroscopic ellipsometry

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	Characterization of interfacial layer of DUV coatings by spectroscopic ellipsometry
	Deng W.
	2013
会议名称	2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012
会议日期	December 26, 2012 - December 27, 2012
会议地点	Guilin, China
页码	277-283
英文摘要	The Interfacial layer has an important influence on the optical performance of the deep ultraviolet (DUV) coatings. The variable angle Spectroscopic ellipsometry measurements of three kinds of DUV coating samples were performed in the wavelength range 150-500nm using a purged variable angle Spectroscopic ellipsometer. The samples include the single layer sample, double layers sample, and three layers sample. The thickness and optical index of the MgF2 layer and LaF3 layer as well as those of the interfacial layer between them were obtained by successful regression of the SE measurements. For the single layer, the agreement of the results between the SE and the spectrophotometic techniques was very good. The obtained thickness of the two kinds of interfacial layer was in consistent with the RMS results of the single layer obtained by AFM, indicating the obtained results were reliable. (2013) Trans Tech Publications, Switzerland.
收录类别	EI
会议录	2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012
会议录出版者	Trans Tech Publications
会议录出版地	Guilin, China
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/40962]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Deng W.. Characterization of interfacial layer of DUV coatings by spectroscopic ellipsometry[C]. 见:2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012. Guilin, China. December 26, 2012 - December 27, 2012.