Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出 > 会议论文

	Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry
	Deng W.
	2013
会议名称	2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012
会议日期	December 26, 2012 - December 27, 2012
会议地点	Guilin, China
页码	243-248
英文摘要	The optical characterization of LaF3 thin film in DUV spectral range was experimental investigated by using a variable angle purged UV spectroscopic ellipsometer. In order to take into account the inhomogeneity, a theory model that dividing the single thin film into several sublayers was adopted. Two kinds of LaF3 thin films fabricated on fused silicate substrate with different substrates temperature were tested. From the obtained optical index and the physical thickness of different sublayer in the two different kinds of LaF3 thin films, it was found that, the inhomogeneity of the LaF3 thin film deposited with substrate temperature at 300C was stronger than that of the LaF3 thin film deposited with substrate temperature at 250, indicating that the substrate temperature has important influence on the optical index and inhomogeneity of LaF3 thin films. For both of the two kinds LaF3 thin films, the agreement between the measured transmittance and the simulated transmittance using the parameters from regression of SE was nice, indicating that the selection of the material dispersion law and regression procedure were successful. (2013) Trans Tech Publications, Switzerland.
收录类别	EI
会议录	2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012
会议录出版者	Trans Tech Publications
会议录出版地	Guilin, China
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/40961]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Deng W.. Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry[C]. 见:2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012. Guilin, China. December 26, 2012 - December 27, 2012.