Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method

	Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method
	Jinming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang
刊名	journal of vacuum science & technology a: vacuum, surfaces, and films
	2013
卷号	31 期号:3 页码:031404 - 031404-5
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2014-03-18
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/24518]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Jinming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang. Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method[J]. journal of vacuum science & technology a: vacuum, surfaces, and films,2013,31(3):031404 - 031404-5.
APA	Jinming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang.(2013).Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method.journal of vacuum science & technology a: vacuum, surfaces, and films,31(3),031404 - 031404-5.
MLA	Jinming Liu, Youwen Zhao, Zhiyuan Dong, Fengyun Yang, Fenghua Wang."Improvement of the surface quality of semi-insulating InP substrates through a novel etching and cleaning method".journal of vacuum science & technology a: vacuum, surfaces, and films 31.3(2013):031404 - 031404-5.