Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering

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	Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering
	Lu, HL ; Song, SQ ; Gu, XF ; He, SL ; Chen, CL ; Song, GB ; Cai, ZH ; Guo, HM ; Gao, HJ ; Sun, L
刊名	JOURNAL OF NANO RESEARCH
	2013
卷号	22 页码:23
关键词	Ferroelectric Thin Film BaTiO3 Magnetron Sputtering
ISSN号	1662-5250
通讯作者	Lu, HL (reprint author), Univ Houston, Dept Mech Engn, Houston, TX 77204 USA.
中文摘要	Direct integration of ferroelectrics with semiconductors is critical to lower the cost and simplify the production procedures for data storage/processing components and miniature sensor/actuator development. By optimizing magnetron sputtering parameters, highly <001> preferential growth of BaTiO3 thin films with reproducible ferroelectric responses have been achieved on Si(001) substrates. The thin film ferroelectric characteristics were systematically studied by piezoresponse force microscopy, and a piezoelectric coefficient d(33) of 24pm/V has been measured. It is found that the scanning tip sidewall angle and cantilever tilt affect the contour and size of polarized area.
资助信息	DOD TATRC award through the Alliance for Nano Health [W81XWH-09-2-0139]; 111 Project [B12018]; PAPD of Jiangsu Higher Education Institutions; U.S. Department of Energy Sciences, Office of Science [W-31-109-ENG-38]
语种	英语
公开日期	2014-01-16
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/57340]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Lu, HL,Song, SQ,Gu, XF,et al. Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering[J]. JOURNAL OF NANO RESEARCH,2013,22:23.
APA	Lu, HL.,Song, SQ.,Gu, XF.,He, SL.,Chen, CL.,...&Sun, L.(2013).Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering.JOURNAL OF NANO RESEARCH,22,23.
MLA	Lu, HL,et al."Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering".JOURNAL OF NANO RESEARCH 22(2013):23.