Preparation, microstructure and dielectric properties of Bao(0.5)Sr(0.5)TiO(3) thin films grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition

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	Preparation, microstructure and dielectric properties of Bao(0.5)Sr(0.5)TiO(3) thin films grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition
	Zhu, XH ; Zheng, DN ; Peng, W ; Zhu, JG ; Yuan, XW ; Li, J ; Zhang, MJ ; Chen, YF ; Tian, HY ; Xu, XP
刊名	MATERIALS LETTERS
	2004
卷号	58 期号:27-28 页码:3591
关键词	TUNABLE MICROWAVE APPLICATIONS BUFFER LAYER TUNABILITY OXYGEN DEVICES MEMORY (BA
ISSN号	0167-577X
通讯作者	Zhu, XH (reprint author), Chinese Acad Sci, Natl Lab Superconduct, Inst Phys, POB 603, Beijing 100080, Peoples R China.
中文摘要	Barium strontium titanate Ba0.5Sr0.5TiO3 (BST) thin films have been deposited on Pt/Ti/SiO2/Si substrates by a pulsed laser deposition method. The low-frequency dielectric responses of the BST films, grown at different substrate temperatures (T,), were measured as functions of frequency in the frequency range from 1 kHz to 1 MHz. With increase of T-s, the grain size of BST thin films became larger and the crystallinity was greatly improved, and then the dielectric permittivity increased, while the dielectric dispersion rose drastically. The origin of the large dielectric relaxation is believed to result from the aggravation of oxygen diffusion at the BST/Pt interface for the BST thin films grown at comparatively higher temperatures. This concept could be further explained by considering the influence of post-annealing in oxygen ambient on the dielectric properties of BST thin films. Our results reveal that the dielectric properties are strongly dependent on the processing conditions and the microstructure of thin films. (C) 2004 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
公开日期	2013-09-24
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/51369]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zhu, XH,Zheng, DN,Peng, W,et al. Preparation, microstructure and dielectric properties of Bao(0.5)Sr(0.5)TiO(3) thin films grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition[J]. MATERIALS LETTERS,2004,58(27-28):3591.
APA	Zhu, XH.,Zheng, DN.,Peng, W.,Zhu, JG.,Yuan, XW.,...&Xu, XP.(2004).Preparation, microstructure and dielectric properties of Bao(0.5)Sr(0.5)TiO(3) thin films grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition.MATERIALS LETTERS,58(27-28),3591.
MLA	Zhu, XH,et al."Preparation, microstructure and dielectric properties of Bao(0.5)Sr(0.5)TiO(3) thin films grown on Pt/Ti/SiO2/Si substrates by pulsed laser deposition".MATERIALS LETTERS 58.27-28(2004):3591.