Wet chemical etching of ZnO film using aqueous acidic salt

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	Wet chemical etching of ZnO film using aqueous acidic salt
	Zheng, H ; Du, XL ; Luo, Q ; Jia, JF ; Gu, CZ ; Xue, QK
刊名	THIN SOLID FILMS
	2007
卷号	515 期号:7-8 页码:3967
关键词	ROOM-TEMPERATURE
ISSN号	0040-6090
通讯作者	Du, XL (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, POB 603, Beijing 100080, Peoples R China.
中文摘要	Nanocomposite coatings have a great superiority of industrial application in surface modification of tools and dies due to special properties such as compatible microstructure, excellent mechanical properties and favorable chemical stability. In this study, Ti-Si-N coatings were deposited on polished high speed steel (HSS) WI8Cr4V by industrial-scale pulsed d.c PECVD plant. The structure of Ti-Si-N coatings deposited at the bottoms of deep holes with different height was investigated by X-ray diffraction and X-ray photoelectron spectroscopy. With the increase of the measured depths at the bottom of the holes, the silicon content in the Ti-Si-N coatings increases, while nanocomposites made of crystallite phase TiN, TiSi2 and amorphous Si3N4 was found in deeper hole. Thickness and bonding strength of coatings increases with the increase of pulsed frequency, which may result from the change of the cathode-sheath thickness (S). It was found that S and hardness of the coatings have a2,-p hole, respectively. dependence on empty set/h(2), whereempty set and h are diameter and height of the deep hole, respectively. (C) 2006 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
公开日期	2013-09-23
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/46640]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zheng, H,Du, XL,Luo, Q,et al. Wet chemical etching of ZnO film using aqueous acidic salt[J]. THIN SOLID FILMS,2007,515(7-8):3967.
APA	Zheng, H,Du, XL,Luo, Q,Jia, JF,Gu, CZ,&Xue, QK.(2007).Wet chemical etching of ZnO film using aqueous acidic salt.THIN SOLID FILMS,515(7-8),3967.
MLA	Zheng, H,et al."Wet chemical etching of ZnO film using aqueous acidic salt".THIN SOLID FILMS 515.7-8(2007):3967.