The Fabrication of Ferromagnetic Nanocontact Structure

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	The Fabrication of Ferromagnetic Nanocontact Structure
	Zhang, YG ; Wang, KG ; Yang, HF ; Xia, XX ; Yao, ZN ; Gu, CZ
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2010
卷号	10 期号:11 页码:7138
关键词	DOMAIN-WALL MOTION
ISSN号	1533-4880
通讯作者	Wang, KG (reprint author), NW Univ Xian, Inst Photon & Photon Technol, Xian 710069, Peoples R China.
中文摘要	In this paper, we report the fabrication of permalloy nanocontact structures with greatly improved surface and edge smoothness. Magnetic sputtering and thermal evaporation were used for metal film deposition, and lift-off and dry etching techniques were employed for nanocontact structure patterning. The compositional properties of the resulting nanocontacts were investigated using energy dispersive analysis of X-ray (EDAX). Atom force microscope and scanning electron microscope were used for morphological characterisation. We found that high quality permalloy nanocontact structures can be obtained by using the combination of thermal evaporation and lift-off with optimised processing parameters; meanwhile, in the case of depositing metal films using magnetic sputtering, dry etching technique rather than lift-off was used for improved surface morphology of the nanostructures.
收录类别	SCI
语种	英语
公开日期	2013-09-23
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/45148]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zhang, YG,Wang, KG,Yang, HF,et al. The Fabrication of Ferromagnetic Nanocontact Structure[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2010,10(11):7138.
APA	Zhang, YG,Wang, KG,Yang, HF,Xia, XX,Yao, ZN,&Gu, CZ.(2010).The Fabrication of Ferromagnetic Nanocontact Structure.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,10(11),7138.
MLA	Zhang, YG,et al."The Fabrication of Ferromagnetic Nanocontact Structure".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 10.11(2010):7138.