Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti : sapphire laser

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	Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti : sapphire laser
	Kanai, T ; Kanda, T ; Sekikawa, T ; Watanabe, S ; Togashi, T ; Chen, CT ; Zhang, CQ ; Xu, ZY ; Wang, JY
刊名	JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS
	2004
卷号	21 期号:2 页码:370
关键词	KBE2BO3F2 CRYSTAL
ISSN号	0740-3224
通讯作者	Kanai, T: Univ Tokyo, Inst Solid State Phys, 5-1-5 Kashiwanoha, Kashiwa, Chiba 2778581, Japan.
中文摘要	We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe2BO3F2 crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F-2 laser lithography with an average power of 0.8 muW. (C) 2004 Optical Society of America.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/38687]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Kanai, T,Kanda, T,Sekikawa, T,et al. Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti : sapphire laser[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS,2004,21(2):370.
APA	Kanai, T.,Kanda, T.,Sekikawa, T.,Watanabe, S.,Togashi, T.,...&Wang, JY.(2004).Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti : sapphire laser.JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS,21(2),370.
MLA	Kanai, T,et al."Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti : sapphire laser".JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS 21.2(2004):370.