Field emission characteristics of AIN coated silicon nanocone

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	Field emission characteristics of AIN coated silicon nanocone
	Shi, CY ; Wang, Q ; Yue, SL ; Gu, CZ
刊名	Nanoscience and Technology, Pts 1 and 2
	2007
卷号	121-123 页码:797
关键词	ELECTRON-AFFINITY ALN ARRAYS EMITTERS TIPS
ISSN号	1012-0394
通讯作者	Gu, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China.
中文摘要	Nanoscaled silicon cone arrays were formed on mirror-polished silicon wafers by plasma etching using hot filament chemical vapor deposition (HFCVD) system. A mixture of CH4 and H-2 was introduced during silicon cone formation. AlN films were coated on Si cone arrays using radio frequency (RF) magnetron sputtering system. Scanning electrons microscopy (SEM) was employed to characterize the morphology of silicon cone arrays before and after AlN coating. The field emission characteristics of AlN coated silicon cone arrays, uncoated silicon cone arrays and AlN films were studied and compared, and the silicon cone arrays with AlN coating showed the best enhanced electron emission properties due to the negative electron affinity of AlN coating layer and the high aspect ratio of silicon cone. For AlN coated silicon cone arrays, a slight hysteresis between the upward and downward voltage sweeps was also observed and the field emission currents from AlN coated Si nanocone arrays decreased with the increase of the thickness of AlN films, which could be mainly attributed to the space charge buildup in AlN film with wide band gap.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/38145]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Shi, CY,Wang, Q,Yue, SL,et al. Field emission characteristics of AIN coated silicon nanocone[J]. Nanoscience and Technology, Pts 1 and 2,2007,121-123:797.
APA	Shi, CY,Wang, Q,Yue, SL,&Gu, CZ.(2007).Field emission characteristics of AIN coated silicon nanocone.Nanoscience and Technology, Pts 1 and 2,121-123,797.
MLA	Shi, CY,et al."Field emission characteristics of AIN coated silicon nanocone".Nanoscience and Technology, Pts 1 and 2 121-123(2007):797.