Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs

CORC > 物理研究所 > 物理所公开发表论文 > 期刊论文

	Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs
	Zhou, CZ ; Wang, C ; Li, ZY
刊名	ACTA PHYSICA SINICA
	2012
卷号	61 期号:1
关键词	SINGLE QUANTUM-DOT WAVE-GUIDE DROP FILTER NANOCAVITY
ISSN号	1000-3290
通讯作者	Zhou, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Lab Opt Phys, Beijing 100190, Peoples R China.
中文摘要	We fabricate a high Q photonic crystal cavity on the top of SOI (silicon on insulator) with EBL (electron beam lithography) and ICP (inductively coupled plasma). The value of Q can reach 7 x 10(4). It provides basic condition for the following experiments, for example for the study of interaction between light and substance. The high Q cavity also provides good circumstance for the quantum information. The theoretical result of the value of Q is 1.2 x 10(5) from FDTD (finite difference time domain) simulation.
收录类别	SCI
资助信息	National Natural Science Foundation of China [10525419]; National Basic Research Program of China [2011CB922002]
语种	中文
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/37902]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Zhou, CZ,Wang, C,Li, ZY. Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs[J]. ACTA PHYSICA SINICA,2012,61(1).
APA	Zhou, CZ,Wang, C,&Li, ZY.(2012).Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs.ACTA PHYSICA SINICA,61(1).
MLA	Zhou, CZ,et al."Fabrication and spectra-measurement of high Q photonic crystal cavity on silicon slabs".ACTA PHYSICA SINICA 61.1(2012).