Experimental studies of axial magnetic fields generated in ultrashort-pulse laser-plasma interaction | |
Li, YT ; Zhang, J ; Chen, LM ; Zhao, LZ ; Xia, JF ; Wei, ZY ; Jiang, WM | |
刊名 | SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY
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2000 | |
卷号 | 43期号:12页码:1312 |
关键词 | OVERDENSE PLASMAS LIGHT ABSORPTION TARGETS |
ISSN号 | 1006-9283 |
通讯作者 | Zhang, J: Chinese Acad Sci, Inst Phys, Lab Opt Phys, POB 603, Beijing 100080, Peoples R China. |
中文摘要 | Both (0 0 1) and (1 1 I) oriented Si wafers were implanted with Ti ions to 5 x 10(17)ions/cm(2). Under various beam currents, X-ray diffraction (XRD) patterns show that there are different initial silicides created. The formation of C49 TiSi2 and/or Ti5Si3 depends on beam currents and orientations of substrates. When larger beam current was used, C49 TiSi2 and/or Ti5Si3 transformed into C54 TiSi2. Therefore, the sheet resistance could be reduced. Anneals increase the phase transformation and the C54 TiSi2 grows with preferential orientations. Different orientation relationships are found on two kinds of wafers. Moreover, it is noted that Ti atomic profile has only a small change after annealing. (C) 2000 Elsevier Science Ltd. All rights reserved. |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2013-09-17 |
内容类型 | 期刊论文 |
源URL | [http://ir.iphy.ac.cn/handle/311004/37805] ![]() |
专题 | 物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文 |
推荐引用方式 GB/T 7714 | Li, YT,Zhang, J,Chen, LM,et al. Experimental studies of axial magnetic fields generated in ultrashort-pulse laser-plasma interaction[J]. SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY,2000,43(12):1312. |
APA | Li, YT.,Zhang, J.,Chen, LM.,Zhao, LZ.,Xia, JF.,...&Jiang, WM.(2000).Experimental studies of axial magnetic fields generated in ultrashort-pulse laser-plasma interaction.SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY,43(12),1312. |
MLA | Li, YT,et al."Experimental studies of axial magnetic fields generated in ultrashort-pulse laser-plasma interaction".SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY 43.12(2000):1312. |
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