Effect of gas composition on the growth and electrical properties of boron-doped diamond films

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	Effect of gas composition on the growth and electrical properties of boron-doped diamond films
	Wang, ZL ; Lu, C ; Li, JJ ; Gu, CZ
刊名	DIAMOND AND RELATED MATERIALS
	2009
卷号	18 期号:2-3 页码:132
关键词	ELECTRONIC-PROPERTIES THIN-FILMS SUPERCONDUCTIVITY
ISSN号	0925-9635
通讯作者	Gu, CZ: Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, POB 603, Beijing 100080, Peoples R China.
中文摘要	Boron-doped diamond films are synthesized by the hot-filament chemical vapor deposition (HFCVD) method via introduction of the gas mixtures of methane and hydrogen, as well as the boron precursor carried by H(2) through a B(OCH(3))(3) liquid, into the chamber. Boron-doping level in as-grown diamond films can be well controlled in the range from 10(19) to 10(21) cm(-3) by adjusting the BIC ratios of gas mixtures. The morphology, structure and resistivity of as-grown diamond films are investigated with scanning electron microscopy (SEM), X-ray diffraction (XRD) and Hall measurement system. The results show that the crystal quality and carrier concentration and resistivity of the as-grown films are obviously dependent on the B/C ratio of the gas mixtures during the deposition process. A critical B/C ratio of 3:4 is found to correspond to the highest crystal quality, highest carrier concentration and smallest film resistivity of as-grown boron-doped diamond films, which should be mainly related with the effective doping ability. In addition, based on the growth kinetics of the diamond films, the effect of the boron-doping on the growth process is discussed in detail. (C) 2008 Elsevier B.V. All rights reserved.
收录类别	SCI
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/36436]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Wang, ZL,Lu, C,Li, JJ,et al. Effect of gas composition on the growth and electrical properties of boron-doped diamond films[J]. DIAMOND AND RELATED MATERIALS,2009,18(2-3):132.
APA	Wang, ZL,Lu, C,Li, JJ,&Gu, CZ.(2009).Effect of gas composition on the growth and electrical properties of boron-doped diamond films.DIAMOND AND RELATED MATERIALS,18(2-3),132.
MLA	Wang, ZL,et al."Effect of gas composition on the growth and electrical properties of boron-doped diamond films".DIAMOND AND RELATED MATERIALS 18.2-3(2009):132.