Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation

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	Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation
	Cui, AJ ; Li, WX ; Luo, Q ; Liu, Z ; Gu, CZ
刊名	MICROELECTRONIC ENGINEERING
	2012
卷号	98 页码:409
关键词	CHEMICAL-VAPOR-DEPOSITION FREE-SPACE FABRICATION NANOWIRES MOLD
ISSN号	0167-9317
通讯作者	Li, WX: Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China.
中文摘要	Freestanding nanostructures are fundamental elements to construct three-dimensional (3D) nanodevices. The bending of nanopillars by ion irradiation can be used to produce overhanging nanostructures. In this paper, we report the bending of focused-ion-beam (FIB) grown platinum nanopillars by FIB irradiation. The results show that for nanopillars originally perpendicular to the substrate, by adjusting the relative geometry of the incident ion beam and the nanopillars, desired bending direction and shape can be achieved. Such nanostructures can be used for 3D nanodevice constructions. Besides, ion irradiation with optimized conditions can be used to improve the surface morphology of the as-deposited nanopillars. Our results suggest that the method of bending freestanding nanoobjects using FIB is likely to be advantageous to construct interconnects in 3D nanostructures towards the properties investigations of selected individual nanoobjects. (C) 2012 Elsevier B.V. All rights reserved.
收录类别	SCI
资助信息	National Natural Science Foundation of China [91123004, 11104334, 50825206, 10834012, 60801043]; National Basic Research Program (973) of China [2009CB930502]; Chinese Service Center for Scholar Exchange; Outstanding Technical Talent Program of the Chinese Academy of Sciences
语种	英语
公开日期	2013-09-17
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/35123]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Cui, AJ,Li, WX,Luo, Q,et al. Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation[J]. MICROELECTRONIC ENGINEERING,2012,98:409.
APA	Cui, AJ,Li, WX,Luo, Q,Liu, Z,&Gu, CZ.(2012).Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation.MICROELECTRONIC ENGINEERING,98,409.
MLA	Cui, AJ,et al."Controllable three dimensional deformation of platinum nanopillars by focused-ion-beam irradiation".MICROELECTRONIC ENGINEERING 98(2012):409.