Active landmark configuration for accurate nano-positioning | |
Yuan S(袁帅); Liu LQ(刘连庆); Wang ZD(王志东); Xi N(席宁); Wang YC(王越超); Dong ZL(董再励) | |
2013 | |
会议名称 | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
会议日期 | April 10-12, 2013 |
会议地点 | Hangzhou, China |
页码 | 594-599 |
中文摘要 | The spatial uncertainties of atom force microscopy (AFM) tip position hinder the AFM based nano-manipulation. Although the landmark based tip localization can be applied to improve the tip position accuracy in the task space, the PZT nonlinearity and system drift are still a challenge to compensation performance when the tip is positioned far from the landmark. Therefore this paper proposes an active landmark configuration. This method first estimates the nearby area called as the landmark domain around the target position, and then actively manipulates the landmark into the landmark domain by using virtual hand to improve the positioning accuracy. Simulation and experiment illustrate the validity of the proposed method. |
收录类别 | EI |
产权排序 | 1 |
会议录 | 6th IFAC Symposium on Mechatronic Systems, MECH 2013 |
会议录出版者 | IFAC Secretariat |
会议录出版地 | Laxenburg, Austria |
语种 | 英语 |
ISBN号 | 978-3-902823-31-1 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/13899] |
专题 | 沈阳自动化研究所_机器人学研究室 |
推荐引用方式 GB/T 7714 | Yuan S,Liu LQ,Wang ZD,et al. Active landmark configuration for accurate nano-positioning[C]. 见:6th IFAC Symposium on Mechatronic Systems, MECH 2013. Hangzhou, China. April 10-12, 2013. |
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