Effect of substrate bias on the microstructure and tribological performance of GLC films using a hybrid HIPIMS technique.

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 宁波所知识产出

	Effect of substrate bias on the microstructure and tribological performance of GLC films using a hybrid HIPIMS technique.
	Wang AY(汪爱英)
刊名	中国有色金属学报（英文版）
	2012-12-01
卷号	22 期号:1 页码:1—1
通讯作者	汪爱英
合作状况	李雨桐
中文摘要	The Cr-doped hydrogen-GLC films were prepared by a hybrid magnetron sputtering system composed of a direct current magnetron sputtering (dc-MS) source of carbon and a high power impulse magnetron sputtering, (HIPIMS) source of Cr with reactive gas of C2H2. The hydrogen-free GLC and Cr-doped GLC films were also prepared for comparison. In this paper, the influence of substrate bias on the Cr-doped hydrogen-GLC films was investigated. With the increase of substrate bias from -100 V to -250 V, the re-sputtering of weak bonding sp2 firstly occurred and induced an increased sp3 bonding; however, the following sp3 to sp2 transformation result in a decreased sp3 bonding. The change trend of surface roughness and friction coefficient with the increased bias voltages were the same as that of sp3 bond. The lowest surface roughness and lowest friction coefficient corresponded to the highest sp3 with the Cr-GLC-H films at the bias voltage of -100 V.
学科主题	材料科学
原文出处	SCI收录
公开日期	2013-12-16
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/9746]
专题	宁波材料技术与工程研究所_宁波所知识产出
推荐引用方式 GB/T 7714	Wang AY. Effect of substrate bias on the microstructure and tribological performance of GLC films using a hybrid HIPIMS technique.[J]. 中国有色金属学报（英文版）,2012,22(1):1—1.
APA	Wang AY.(2012).Effect of substrate bias on the microstructure and tribological performance of GLC films using a hybrid HIPIMS technique..中国有色金属学报（英文版）,22(1),1—1.
MLA	Wang AY."Effect of substrate bias on the microstructure and tribological performance of GLC films using a hybrid HIPIMS technique.".中国有色金属学报（英文版） 22.1(2012):1—1.