Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin films

CORC > 宁波材料技术与工程研究所 > 中国科学院宁波材料技术与工程研究所 > 宁波所知识产出

	Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin films
	Song WJ(宋伟杰) ; Quanyu Feng • Weiyan Wang • Kemin Jiang • Jinhua Huang • Yulong Zhang • Weijie Song • Ruiqin Tan
刊名	J Mater Sci: Mater Electron
	2012-05-12
期号	23 页码:267—272
通讯作者	宋伟杰
合作状况	李雨桐
中文摘要	Highly transparent and conductive aluminumdoped zinc oxide (AZO) thin films were successfully deposited on glass by DC magnetron sputtering. The effects of Al-doping content (1–4 at.%), substrate temperature (250–350 C) and ultraviolet (UV)-ozone treatment time (0–20 min) on AZO film work function were systematically investigated. It was revealed that the AZO work function increased with the decrease of Al content, while it was almost insensitive to the substrate temperature. Moreover, the UV-ozone treatment significantly improved AZO work function, while the post-treatment time had no effect on AZO work function. Two factors, [OZnAl]/([Zn] ? 1.5[Al]) ratio and carbon contamination on film surface, affected the AZO work function. It was suggested that AZO films with high [OZnAl]/([Zn] ? 1.5[Al]) ratio and reduced carbon concentration, possessed high work function.
学科主题	物理化学
原文出处	SCI收录
公开日期	2013-12-16
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/9617]
专题	宁波材料技术与工程研究所_宁波所知识产出
推荐引用方式 GB/T 7714	Song WJ,Quanyu Feng • Weiyan Wang • Kemin Jiang • Jinhua Huang • Yulong Zhang • Weijie Song • Ruiqin Tan. Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin films[J]. J Mater Sci: Mater Electron,2012(23):267—272.
APA	Song WJ,&Quanyu Feng • Weiyan Wang • Kemin Jiang • Jinhua Huang • Yulong Zhang • Weijie Song • Ruiqin Tan.(2012).Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin films.J Mater Sci: Mater Electron(23),267—272.
MLA	Song WJ,et al."Effect of deposition condition and UV-ozone post-treatment on work function of DC magnetron sputtered AZO thin films".J Mater Sci: Mater Electron .23(2012):267—272.