Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering
	Wu YX(吴艳霞)1,2 ; Chen JM(陈建敏)1 ; Li HX(李红轩)1 ; Ji L(吉利)1 ; Ye YP(冶银平)1 ; Zhou HD(周惠娣)1 ; Li HX(李红轩); Chen JM(陈建敏)
刊名	Applied Surface Science
	2013
卷号	284 页码:165-170
关键词	Diamond-like carbon (DLC) Silver incorporation Microstructure Mechanical properties Tribological properties
ISSN号	0169-4332
通讯作者	陈建敏 ; 李红轩
英文摘要	Silver (Ag)/diamond-like carbon (DLC) nanocomposite films with different Ag concentrations ranging from 0 to 11.02 at.% were prepared by medium frequency unbalanced magnetron sputtering, in which the mixed Ar/CH₄ of different volume ratios were used as the source gases. The doping effects of Ag concentration on microstructure, mechanical and vacuum tribological properties of the DLC films were investigated. It is found that the Ag concentration increased with the increasing Ar/CH₄ ratios, accompanied with the increasing number and size of Ag crystalline. With moderate incorporation of Ag at 3.55 at.%, the film (deposited at the Ar/CH₄ = 65/45) maintained a low internal stress without considerable decrease of hardness and thus improved the adhesion strength. Moreover, the film showed low friction coefficient and the longest sliding lifetime in vacuum. The significant improvement in tribological properties of Ag/DLC nanocomposite films with moderate Ag concentration can be attributed to the low shear strength of Ag clusters on the surface, as well as the diffusion of Ag from the bulk to the surface and wear track.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Grant Nos. 51275509;51175491);the 973 Project of China (No. 2013CB632300);the Chinese Academy of Science
语种	英语
WOS记录号	WOS:000324248600024
公开日期	2013-12-05
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4465]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Li HX(李红轩); Chen JM(陈建敏)
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Wu YX,Chen JM,Li HX,et al. Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering[J]. Applied Surface Science,2013,284:165-170.
APA	Wu YX.,Chen JM.,Li HX.,Ji L.,Ye YP.,...&陈建敏.(2013).Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering.Applied Surface Science,284,165-170.
MLA	Wu YX,et al."Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering".Applied Surface Science 284(2013):165-170.