Thermal design of ground weak force measurement system for inertial sensors

doi:10.37188/CO.2023-0022

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Thermal design of ground weak force measurement system for inertial sensors
	L.-M. Ren, L.-H. Chen, X. Meng and Z. Wang
刊名	Chinese Optics
	2023
卷号	16 期号:6 页码:1404-1413
ISSN号	20971842
DOI	10.37188/CO.2023-0022
英文摘要	In order to meet the ultra-high temperature stability requirements of the ground weak force measurement system for inertial sensor, the thermal design of the whole system is carried out. Firstly, the structure of ground weak force measurement system of inertial sensor, heat transfer path of sensitive structure and internal heat source are introduced. Secondly, according to the index requirements of the thermal control of the system, a high-precision thermal control method combining the three-stage thermal control structure and Proportional Integral Differential (PID) control algorithm is proposed to reduce the influence of temperature noise on the detection sensitivity of the inertial sensor. Then, UG/NX software is used to establish the finite element model and carry out the thermal analysis calculation under different working conditions, and the temperature change value of the measurement system in the time domain after equilibrium is (1.2−1.6) × 10−5 K. Finally, the temperature distribution of the measurement system in the time domain is described in the frequency domain, and the temperature stability results of sensitive structure of the inertial sensor are obtained. The analysis results show that under the current thermal control measures, the temperature stability of the sensitive structure of the inertial sensor is better than 10−4 K/Hz1/2, meeting the requirements of thermal control indicators, and the thermal design scheme is reasonable and feasible. © 2023 Editorial Office of Chinese Optics. All rights reserved.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67813]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.-M. Ren, L.-H. Chen, X. Meng and Z. Wang. Thermal design of ground weak force measurement system for inertial sensors[J]. Chinese Optics,2023,16(6):1404-1413.
APA	L.-M. Ren, L.-H. Chen, X. Meng and Z. Wang.(2023).Thermal design of ground weak force measurement system for inertial sensors.Chinese Optics,16(6),1404-1413.
MLA	L.-M. Ren, L.-H. Chen, X. Meng and Z. Wang."Thermal design of ground weak force measurement system for inertial sensors".Chinese Optics 16.6(2023):1404-1413.