Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films

doi:10.1109/TED.2023.3314400

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films
	J. Jia; H. Zhu; W. Liu; B. Li; Z. Shi; Q. Cui and C. Xu
刊名	IEEE Transactions on Electron Devices
	2023
卷号	70 期号:11 页码:5856-5862
ISSN号	00189383
DOI	10.1109/TED.2023.3314400
英文摘要	Based on the experimental discovery about the negative temperature coefficient (NTC) of ZnO, we fabricated a low-temperature sensor with ZnO thin film. Oxygen plasma and annealing treatment were carried out to manipulate the related defects and explore the negative temperature response, while a series of microstructural and optical properties were also characterized and compared for the cases before and after treatment. It demonstrated that zinc interstitials (Zni) played an important role in NTC response process. Moreover, we simulated the application conditions of cell cryopreservation and conducted relevant tests in the common temperature range of -120 °C-0 °C. The ZnO NTC sensor was applied for actual real-time temperature monitoring in a commercial low-temperature system. The sensor presented a nice sensitivity of 3.51 ×104Ω·K-1 at 90 K, a good repeatability, recoverability, and a fast response speed. The results showed a great potential of ZnO NTC sensor for biomedical cryogenics applications. © 1963-2012 IEEE.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67549]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Jia,H. Zhu,W. Liu,et al. Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films[J]. IEEE Transactions on Electron Devices,2023,70(11):5856-5862.
APA	J. Jia,H. Zhu,W. Liu,B. Li,Z. Shi,&Q. Cui and C. Xu.(2023).Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films.IEEE Transactions on Electron Devices,70(11),5856-5862.
MLA	J. Jia,et al."Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films".IEEE Transactions on Electron Devices 70.11(2023):5856-5862.