AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification

doi:10.1109/JSEN.2023.3253724

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	AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification
	Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song
刊名	IEEE Sensors Journal
	2023
卷号	23 期号:18 页码:20536-20542
ISSN号	1530437X
DOI	10.1109/JSEN.2023.3253724
英文摘要	This article reports the development of hybrid AlGaN-based self-powered solar-blind ultraviolet (UV) focal plane array (FPA) imaging photosensors from material growth and array preparation to functional verification. The detailed process starts with the epitaxial growth by metal-organic chemical vapor deposition (MOCVD). A high-quality AlN template is obtained on the 2-in double-polished c-plane sapphire substrate by introducing a mesothermal AlN (MT-AlN) interlayer and adjusting the growth rate of the high-temperature AlN epilayer (HT-AlN). Then, a polarization-enhanced p-i-n structure photodetector material is grown on the AlN template. Subsequently, based on the p-i-n structural material, a 320×256 back-illuminated solar-blind photodiode array is fabricated and hybridized to a matching Si-based CMOS readout integrated circuit (ROIC) chip to form a focal plane detector. Solar-blind UV detection is observed throughout the array in the 262-281-nm spectral region with a peak external quantum efficiency (EQE) of 65.3% at zero-bias voltage (no antireflection coating) and a nanosecond transient response time at a reverse bias of 5 V. The visible response of the ROIC is eliminated by developing a masking technology that is opaque to visible light, which enables the focal plane detector to achieve a high UV/visible rejection ratio of more than 104. © 2001-2012 IEEE.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67387]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song. AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification[J]. IEEE Sensors Journal,2023,23(18):20536-20542.
APA	Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song.(2023).AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification.IEEE Sensors Journal,23(18),20536-20542.
MLA	Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song."AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification".IEEE Sensors Journal 23.18(2023):20536-20542.