Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide

doi:10.37188/CO.2022-0132

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide
	X. Chen; C. Zhou; K.-W. Liu and D.-Z. Shen
刊名	Chinese Optics
	2022
卷号	15 期号:5 页码:912-928
ISSN号	20971842
DOI	10.37188/CO.2022-0132
英文摘要	Ultraviolet photodetection technology is another dual-use detection technology after infrared detection and laser detection technology, which has broad application prospects. Vacuum photomultiplier tubes and Si-based photodiodes are common commercial UV detectors, but vacuum photomultiplier tubes are susceptible to high temperatures and electromagnetic radiation, and need to work under high pressure while Si-based photodiodes require expensive filters. Wide bandgap semiconductor ultraviolet photodetectors have overcome some of the problems faced by the above two devices, and are becoming the research hotspot. Among them, wide bandgap oxide materials have attracted extensive attention, due to the advantages of easy preparation for high response and high gain devices, and rich micro-structures and nano-structures. In this paper, ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide are combed, and some related researches in recent years are reviewed. The oxide materials involved include ZnO, Ga2O3, SnO2 and TiO2, etc. and the device structures involved include metal-semiconductor-metal devices, Schottky junction devices and heterojunction devices, etc. 2022 Editorial Office of Chinese Optics. All rights reserved.
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内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/67063]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen,C. Zhou,K.-W. Liu and D.-Z. Shen. Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide[J]. Chinese Optics,2022,15(5):912-928.
APA	X. Chen,C. Zhou,&K.-W. Liu and D.-Z. Shen.(2022).Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide.Chinese Optics,15(5),912-928.
MLA	X. Chen,et al."Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide".Chinese Optics 15.5(2022):912-928.