Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System

doi:10.3807/copp.2022.6.3.236

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System
	X. F. Liu; X. Zhang and F. X. Tian
刊名	Current Optics and Photonics
	2022
卷号	6 期号:3 页码:236-243
ISSN号	2508-7266
DOI	10.3807/copp.2022.6.3.236
英文摘要	Monocrystalline silicon has excellent properties, but it is difficult to design and manufacture silicon-based mirrors that can meet engineering applications because of its hard and brittle properties. This pa-per used monocrystalline silicon as the main mirror material in an imaging system to carry out a feasi-bility study. The lightweight design of the mirror is completed by the method of center support and edge cutting. The support structure of the mirror was designed to meet the conditions of wide temperature applications. Isight software was used to optimize the feasibility sample, and the optimized results are that the root mean square error of the mirror surface is 3.6 nm, the rigid body displacement of the mirror is 2.1 mu m, and the angular displacement is 2.5 '' under the conditions of a temperature of Delta 20 celcius and a gravity load of 1 g. The optimized result show that the silicon-based mirror developed in this paper can meet the requirements of engineering applications. This research on silicon-based mirrors can provide guidance for the application of other silicon-based mirrors.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66961]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. F. Liu,X. Zhang and F. X. Tian. Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System[J]. Current Optics and Photonics,2022,6(3):236-243.
APA	X. F. Liu,&X. Zhang and F. X. Tian.(2022).Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System.Current Optics and Photonics,6(3),236-243.
MLA	X. F. Liu,et al."Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System".Current Optics and Photonics 6.3(2022):236-243.