Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations

doi:10.3390/nano12050796

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	Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
	W. L. He; B. Zhao; J. J. Yang; J. Q. Wen; H. Wu; S. L. Guo and L. H. Bai
刊名	Nanomaterials
	2022
卷号	12 期号:5 页码:10
DOI	10.3390/nano12050796
英文摘要	Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser beams (800 nm wavelength, 50 fs duration, 1 kHz repetition), with orthogonal linear polarizations. Different types of surface structures, two-dimensional arrays of square islands (670 nm periodicity) and one-dimensional ripple structures (678 nm periodicity) are found to uniformly distribute over the laser-exposed areas, both of which are remarkably featured by the low spatial frequency. By altering the time delay among three laser beams, we can flexibly control the transition between the two surface structures. The experimental results are well explained by a physical model of the thermally correlated actions among three laser-material interaction processes. This investigation provides a simple, flexible, and controllable processing approach for the large-scale assembly of complex functional nanostructures on bulk semiconductor materials.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66829]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	W. L. He,B. Zhao,J. J. Yang,et al. Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations[J]. Nanomaterials,2022,12(5):10.
APA	W. L. He,B. Zhao,J. J. Yang,J. Q. Wen,H. Wu,&S. L. Guo and L. H. Bai.(2022).Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations.Nanomaterials,12(5),10.
MLA	W. L. He,et al."Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations".Nanomaterials 12.5(2022):10.