High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

doi:10.1016/j.optlaseng.2022.107167

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving
	Y. F. Yin; Z. W. Liu; S. Jiang; W. Wang; H. Z. Yu; G. Jiri; Q. Hao and W. H. Li
刊名	Optics and Lasers in Engineering
	2022
卷号	158 页码:7
ISSN号	0143-8166
DOI	10.1016/j.optlaseng.2022.107167
英文摘要	We propose a high-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving. The system is based on Doppler-steering interferometry of 2D gratings, heterodyne interferometry, and double-spatial element-staggered configuration. We obtain long-stroke and high-precision real-time 2D displacement information using the optical phase change and interference signal decoupling caused by the 2D grating. The system is tested experimentally and compared with a laser interferometer, and found to have a measurement resolution within 3 nm. The error within a measurement of 40 mm is better than +/- 175 nm and +/- 150 nm in the 2D grating directions. The design is then optimized and tested, and the resulting error within the 40-mm range is better than + 50 nm and -40 nm in the X-direction and + 100 nm and -80 nm in the Y -direction. The results show that the proposed configuration improves the accuracy of the measurement system, is suitable for engineering testing, and has the potential for further improvement.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66724]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. F. Yin,Z. W. Liu,S. Jiang,et al. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving[J]. Optics and Lasers in Engineering,2022,158:7.
APA	Y. F. Yin.,Z. W. Liu.,S. Jiang.,W. Wang.,H. Z. Yu.,...&Q. Hao and W. H. Li.(2022).High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving.Optics and Lasers in Engineering,158,7.
MLA	Y. F. Yin,et al."High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving".Optics and Lasers in Engineering 158(2022):7.