Examination of the Blank Error on Mirror Accuracy of Lightweight SiC Mirror and a Compensation Method

doi:10.3390/photonics9050360

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Examination of the Blank Error on Mirror Accuracy of Lightweight SiC Mirror and a Compensation Method
	P. Jiang and P. W. Zhou
刊名	Photonics
	2022
卷号	9 期号:5 页码:12
DOI	10.3390/photonics9050360
英文摘要	Due to excellent characteristics of specific stiffness and thermal stability, silicon carbide-based (SiC) material is commonly selected to construct large-scale lightweight mirror. In general, the fabrication process of SiC mirror is similar to the casting process. The blank error of SiC mirror is 0 similar to 1 mm. Due to the high hardness of SiC, only the mirror surface and some positioning surface will be milled. The mirror surface accuracy will be degraded due to the fact that the blank error can cause significant changes in weight distribution. In this paper, Monte Carlo analysis is firstly performed to examine the blank error on gravity center, stiffness and mirror accuracy of a SiC mirror. It is found that according to the designed mount location, the amount of degradation is more than 2.5 nm of which the probability is 40.3%. It is known that the error of gravity center can be compensated by optimizing the axial mount location. Then inverse modeling and testing of gravity center for the SiC mirror is carried out in order to determine the optimal axial mount location. Based on the proposed method, the mirror degradation introduced by the blank error has been eliminated to the greatest extend.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66647]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P. Jiang and P. W. Zhou. Examination of the Blank Error on Mirror Accuracy of Lightweight SiC Mirror and a Compensation Method[J]. Photonics,2022,9(5):12.
APA	P. Jiang and P. W. Zhou.(2022).Examination of the Blank Error on Mirror Accuracy of Lightweight SiC Mirror and a Compensation Method.Photonics,9(5),12.
MLA	P. Jiang and P. W. Zhou."Examination of the Blank Error on Mirror Accuracy of Lightweight SiC Mirror and a Compensation Method".Photonics 9.5(2022):12.