Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching

doi:10.1364/oe.449870

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching
	D. Z. Shan; N. X. Xu; J. S. Gao; N. T. Song; H. Liu; Y. Tang; X. G. Feng; Y. S. Wang; Y. Zhao; X. Chen and Q. Sun
刊名	Optics Express
	2022
卷号	30 期号:8 页码:13616-13629
ISSN号	1094-4087
DOI	10.1364/oe.449870
英文摘要	An all-silicon long-wavelength infrared (LWIR) achromatic metalens based on deep silicon etching is designed in this paper. With a fixed aperture size, the value range of the equivalent optical thickness of the non-dispersive meta-atoms constructing the achromatic metalens determines the minimum f-number. The fabrication characteristic with high aspect ratio of deep silicon etching amplifies the difference value of optical thickness between different meta-atoms by increasing the propagation distance of the propagation mode, which ensures a small f-number to obtain a better imaging resolution. A 280-gm-diameter silicon achromatic metalens with a f-number of 1 and the average focusing efficiency of 27.66% has been designed and simulated to validate the feasibility of this strategy. The simulation results show that the maximum focal length deviation percentage from the target value between the wavelength of 8.6 and 11.4 gm is 1.61%. This achromatic metalens design is expected to play a role in the field of LWIR integrated optical system. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/66547]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	D. Z. Shan,N. X. Xu,J. S. Gao,et al. Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching[J]. Optics Express,2022,30(8):13616-13629.
APA	D. Z. Shan.,N. X. Xu.,J. S. Gao.,N. T. Song.,H. Liu.,...&X. Chen and Q. Sun.(2022).Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching.Optics Express,30(8),13616-13629.
MLA	D. Z. Shan,et al."Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching".Optics Express 30.8(2022):13616-13629.