Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating

doi:10.1016/j.apsusc.2015.06.040

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	Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating
	Qiang, Li 1; Gao, Kaixiong 1; Zhang, Lifang 1; Wang, Jian 1,2; Zhang, Bin 1; Zhang, Junyan 1
刊名	Applied Surface Science
	2015-10-30
卷号	353 页码:522-529
关键词	Carbon films Diamond like carbon films Friction High resolution transmission electron microscopy Mechanical properties Photoelectron spectroscopy Residual stresses Tribology Wear of materials X ray photoelectron spectroscopy Constant thickness DLC film Friction coefficients Mechanical and tribological properties Structural characteristics Target currents Ti interlayers Tribological performance
ISSN号	01694332
DOI	10.1016/j.apsusc.2015.06.040
英文摘要	W/Ti-doped diamond-like carbon (DLC) films were fabricated on Si substrates by co-sputtering W and Ti targets in methane and argon mixture atmosphere. The composition and the microstructure, internal stress, mechanical and tribological properties of the films were measured by X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), Raman spectra, BGS 6341 type film stress tester, nano-indentor and reciprocating ball-on-disc tester, respectively. The results indicated all films showed the amorphous structural characteristics and a constant thickness value of ∼600 nm (195 ± 15 nm Ti interlayer was designed in order to minimize the influence of Ti interlayer), and the Ti content increased from 0 to 34.5% as the W target current increased from 0 A to 14 A. As the W concentration increased from 0 to 2.6 at.%, the hardness increased to 12.7 GPa and the internal stress maintained at a low value and almost no change. Meanwhile, the friction coefficient and wear rate showed the lowest value (0.023 and 1.2 × 10-8 mm3/N m, respectively). With the W content increased to 34.5 at.% further, the internal stress, friction coefficient and wear rate of film are dramatically increased. © 2015 Elsevier B.V. All rights reserved.
WOS研究方向	Chemistry ; Materials Science ; Physics
语种	英语
出版者	Elsevier B.V., Netherlands
WOS记录号	WOS:000361220700067
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/150399]
专题	土木工程学院
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou; 730000, China; 2.School of Petroleum Chemical Engineering, Lanzhou University of Technology, Lanzhou; 730050, China
推荐引用方式 GB/T 7714	Qiang, Li,Gao, Kaixiong,Zhang, Lifang,et al. Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating[J]. Applied Surface Science,2015,353:522-529.
APA	Qiang, Li,Gao, Kaixiong,Zhang, Lifang,Wang, Jian,Zhang, Bin,&Zhang, Junyan.(2015).Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating.Applied Surface Science,353,522-529.
MLA	Qiang, Li,et al."Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating".Applied Surface Science 353(2015):522-529.