Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering | |
Jiang, Jinlong1,2; Wang, Qiong1; Huang, Hao1; Wang, Yubao1; Zhang, Xia1; Hao, Junying2 | |
刊名 | Surface and Coatings Technology
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2014-02-15 | |
卷号 | 240页码:419-424 |
关键词 | Amorphous carbon Amorphous silicon Carbon films Magnetron sputtering Microstructure Rotation Substrates Surface morphology a-C:H films Hydrogenated amorphous carbon (a-C:H) MF magnetron sputtering Microstructure and properties Rotary substrates Rotating substrates Shadowing effects Substrate rotation |
ISSN号 | 02578972 |
DOI | 10.1016/j.surfcoat.2013.12.067 |
英文摘要 | Ti and Si dual-doped hydrogenated amorphous carbon (a-C:H) films were synthesized by mid-frequency (MF) magnetron sputtering with stationary and rotary substrates. The effects of substrate rotation on the microstructure, surface morphology, internal stress and mechanical properties were investigated. The results show that substrate rotation plays an important role in the growth of the a-C:H films. The film deposited on rotary substrate has a higher sp2 content with high degree of bond disorder and relatively low H content, thus resulting in much lower compressive stress and high hardness. The structural changes induced by the substrate rotation are discussed in terms of subplantation and migration roles of incident species in growth of the films. Moreover, the film deposited on rotary substrate shows smoother surface with small and dense particles, which is attributed to suppressing the shadowing effect by rotating substrate. © 2013 Elsevier B.V. |
资助项目 | Excellent Young Teachers Program of Lanzhou University of Technology[1010ZCX010] |
WOS研究方向 | Materials Science ; Physics |
语种 | 英语 |
出版者 | Elsevier B.V. |
WOS记录号 | WOS:000331989900057 |
状态 | 已发表 |
内容类型 | 期刊论文 |
源URL | [http://ir.lut.edu.cn/handle/2XXMBERH/113605] ![]() |
专题 | 理学院 |
通讯作者 | Jiang, Jinlong |
作者单位 | 1.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
推荐引用方式 GB/T 7714 | Jiang, Jinlong,Wang, Qiong,Huang, Hao,et al. Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering[J]. Surface and Coatings Technology,2014,240:419-424. |
APA | Jiang, Jinlong,Wang, Qiong,Huang, Hao,Wang, Yubao,Zhang, Xia,&Hao, Junying.(2014).Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering.Surface and Coatings Technology,240,419-424. |
MLA | Jiang, Jinlong,et al."Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering".Surface and Coatings Technology 240(2014):419-424. |
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