Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering

doi:10.1002/sia.5361

CORC > 兰州理工大学 > 兰州理工大学 > 理学院

	Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering
	Jiang, Jinlong 1; Huang, Hao 1; Wang, Qiong 1; Zhu, Weijun 1; Hao, Junying 2; Liu, Weimin 2
刊名	SURFACE AND INTERFACE ANALYSIS
	2014-03
卷号	46 期号:3 页码:139-144
关键词	Amorphous carbon Amorphous silicon Friction Magnetron sputtering Microstructure Morphology Semiconductor doping Surface morphology Tribology a-C:H films Co-doping Comparative studies Friction performance Mechanical and tribological properties Structure and properties Super-low frictions Tribological properties
ISSN号	0142-2421
DOI	10.1002/sia.5361
英文摘要	The titanium/silicon mono- and co-doped amorphous carbon films were deposited by mid-frequency magnetron sputtering Ti target, Si target, and Ti80S20 alloy target, respectively. The effects of doped elements on the composition, surface morphology, microstructure, and mechanical and tribological properties of the films were investigated. The results reveal that the ratio of sp3 and sp2 carbon bonds of the films is regulated between 0.28 and 0.62 by a combination of Ti and Si dopant. The addition of small amounts of silicon leads to an increase in sp3 bonds and disorder degree of the sp2 carbon. The co-doped film exhibits significantly superior friction performance than the mono-doped films. The ultra-low friction (μ 3/sp2 ratio of the films may play a key role for the superlow friction. Copyright © 2013 John Wiley & Sons, Ltd.
资助项目	Excellent Young Teachers Program of Lanzhou University of Technology[1010ZCX010]
WOS研究方向	Chemistry
语种	英语
出版者	WILEY-BLACKWELL
WOS记录号	WOS:000331356900004
状态	已发表
内容类型	期刊论文
源URL	[http://119.78.100.223/handle/2XXMBERH/34444]
专题	理学院
通讯作者	Jiang, Jinlong
作者单位	1.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 2.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China
推荐引用方式 GB/T 7714	Jiang, Jinlong,Huang, Hao,Wang, Qiong,et al. Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering[J]. SURFACE AND INTERFACE ANALYSIS,2014,46(3):139-144.
APA	Jiang, Jinlong,Huang, Hao,Wang, Qiong,Zhu, Weijun,Hao, Junying,&Liu, Weimin.(2014).Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering.SURFACE AND INTERFACE ANALYSIS,46(3),139-144.
MLA	Jiang, Jinlong,et al."Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering".SURFACE AND INTERFACE ANALYSIS 46.3(2014):139-144.