Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique

doi:10.1016/j.apsusc.2012.01.072

	Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique
	Cui, Jinfeng 1; Qiang, Li 1,2; Zhang, Bin 2; Ling, Xiao 1,2; Yang, Tao 1,2; Zhang, Junyan 2
刊名	Applied Surface Science
	2012-04-01
卷号	258 期号:12 页码:5025-5030
关键词	Carbides Carbon films Composite films Flow of gases Friction Hardness Magnetron sputtering Mechanical properties Photoelectron spectroscopy Semiconductor doping Titanium carbide Tribology X ray photoelectron spectroscopy Atomic concentration Concentration rose Gas-flow ratio Low friction coefficients Mechanical and tribological properties Stoney equation Ti doping Tribological performance
ISSN号	01694332
DOI	10.1016/j.apsusc.2012.01.072
英文摘要	Ti-doped diamond-like carbon (DLC) films were deposited on Si substrates at room temperature by magnetron sputtering Ti twin-target in methane and argon mixture atmosphere. The DLC films with different Ti concentrations were fabricated by varying the gas flow ratio of Ar/CH4. X-ray photoelectron spectroscopy (XPS), Raman spectra were used to analyze the composition and the microstructure of the films. The internal stress was calculated by using the Stoney equation, where the curvature of the film/substrate was measured by BGS 6341 type film stress tester. The mechanical and tribological properties of the films were systematically studied by the nano-indentor and reciprocating ball-on-disc tester, respectively. The Ti atomic concentration in the films increased from 0.41% to 8.2% as the Ar/CH 4 flow ratio increased from 60/190 to 140/110. The Ti atoms exist mainly in the form of metallic-like Ti rather than TiC when Ti concentration is 0.41%, confirmed by XPS analysis. As the Ti concentration rose to 6.7%, the Ti-DLC films transformed to composite DLC films with carbide phase embedded in the DLC matrix because of the formation of TiC. As a result, the hardness is decreased, while the stress is dramatically increased. The Ti-DLC films with 0.41% Ti doping showed a relatively high hardness (13.75 GPa), low stress (0.56 GPa), extremely low wear rate (∼10-10 mm3/Nm) and low friction coefficient (0.05). © 2011 Elsevier B.V. All rights reserved.
WOS研究方向	Chemistry ; Materials Science ; Physics
语种	英语
出版者	Elsevier B.V.
WOS记录号	WOS:000301002600005
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/150147]
专题	实验室建设与管理处石油化工学院
作者单位	1.School of Petroleum Chemical Engineering, Lanzhou University of Technology, Lanzhou 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
推荐引用方式 GB/T 7714	Cui, Jinfeng,Qiang, Li,Zhang, Bin,et al. Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique[J]. Applied Surface Science,2012,258(12):5025-5030.
APA	Cui, Jinfeng,Qiang, Li,Zhang, Bin,Ling, Xiao,Yang, Tao,&Zhang, Junyan.(2012).Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique.Applied Surface Science,258(12),5025-5030.
MLA	Cui, Jinfeng,et al."Mechanical and tribological properties of Ti-DLC films with different Ti content by magnetron sputtering technique".Applied Surface Science 258.12(2012):5025-5030.