Effect of external electric field on ultraviolet-induced nanoparticle colloid jet machining

doi:10.1088/1361-6528/ac55d0

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	Effect of external electric field on ultraviolet-induced nanoparticle colloid jet machining
	Song, Xiaozong; Ge, Shundong; Niu, Yanjiang; Yan, Dengwei
刊名	Nanotechnology
	2022-05-21
卷号	33 期号:21
关键词	Electric fields Fourier transform infrared spectroscopy Photocatalytic activity Polishing Scanning electron microscopy Silicon Silicon carbide Surface roughness Titanium dioxide X ray photoelectron spectroscopy Electric field enhanced ultraviolet-induced nanoparticle colloid jet machining External electric field Jet machining Material removal efficiency Nanoparticle colloids Photocatalytic activities Polishing slurries TiO2 nano-particles Ultra smooth surface Workpiece
ISSN号	0957-4484
DOI	10.1088/1361-6528/ac55d0
英文摘要	Electric field enhanced ultraviolet (UV)-induced nanoparticle colloid jet machining is proposed to improve the material removal efficiency of UV-induced nanoparticle colloid jet machining by applying an external electric field. The influences of TiO2 nanoparticle concentration, applied electric field voltage and pH value for the photocatalytic activity of the polishing slurry was investigated by orthogonal experiments. Terephthalic acid (TPA) was used as a fluorescent molecular probe to reflect the relative concentration of hydroxyl radical groups (·OH) in polishing slurry, which directly affects the material removal rate in the UV-induced nanoparticle colloid jet machining process. Scanning electron microscopy (SEM), Fourier-transform infrared spectroscopy (FT-IR), and x-ray photoelectron spectroscopy (XPS) were employed to inspect the interaction variations between the TiO2 nanoparticles and the SiC workpiece surface. The SEM and XPS results exhibit that the external electric field can enhance the adsorption of TiO2 nanoparticles on the SiC workpiece surface, which can create more interfacial reaction active centers in the polishing process. The FT-IR spectra results indicate that TiO2 nanoparticles were chemically bonded to the SiC surface by oxygen-bridging atoms in Ti-O-Si bonds. The results of fixed-point polishing experiment show that due to the enhancement effect of external electric field on the photocatalytic activity of the polishing slurry, the material removal efficiency of electric field enhanced UV-induced nanoparticle colloid jet machining is 15% higher than that of UV-induced nanoparticle colloid jet machining, and is 28% higher than that of pure nanoparticle colloid jet machining. Atomic force microscope micromorphology show that an ultra-smooth SiC workpieces with surface roughness of Rms 0.84 nm (Ra 0.474 nm) has been obtained by electric field enhanced UV-induced nanoparticle colloid jet machining. © 2022 IOP Publishing Ltd.
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
出版者	IOP Publishing Ltd
WOS记录号	WOS:000764330300001
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/158047]
专题	机电工程学院
作者单位	School of Mechanical and Electronical Engineering, Lanzhou University of Technology, Lanzhou, China
推荐引用方式 GB/T 7714	Song, Xiaozong,Ge, Shundong,Niu, Yanjiang,et al. Effect of external electric field on ultraviolet-induced nanoparticle colloid jet machining[J]. Nanotechnology,2022,33(21).
APA	Song, Xiaozong,Ge, Shundong,Niu, Yanjiang,&Yan, Dengwei.(2022).Effect of external electric field on ultraviolet-induced nanoparticle colloid jet machining.Nanotechnology,33(21).
MLA	Song, Xiaozong,et al."Effect of external electric field on ultraviolet-induced nanoparticle colloid jet machining".Nanotechnology 33.21(2022).