Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide

doi:10.3788/CJL201744.0402001

	Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide
	Yan, Xiaodong 1; Ren, Ni 2; Tang, Fuling 1; Xue, Hongtao 1; Zhang, Hongwei 1; Yang, Jianping 2; Liu, Xiaoli 2
刊名	Zhongguo Jiguang/Chinese Journal of Lasers
	2017-04-10
卷号	44 期号:4
关键词	Etching Metals Polyimides Temperature distribution Thermal conductivity Aluminum thin films Etching depth Laser technique Movement speed Pulse laser
ISSN号	02587025
DOI	10.3788/CJL201744.0402001
英文摘要	In order to study the laws of single- or double-layer metal/polyimide etched by movable pulse lasers, one general model of movable nanosecond pulse laser etching is built with the finite element method. The influence of laser movement speed on etching depth is discussed, and the law of temperature change of the metal Al thin films and double-layer metal thin films etched by movable pulse laser is analyzed. The results show that, with a certain movement speed, the etching depth increases at the beginning, then the increase rate slows down, and the etching depth approaches to one constant maximum value. The temperature change at the interface between the metal and the substrate material lags behind that of the metal thin film close to laser source, and the substrate temperature rises continually after turning off the laser. As for double-layer metal films, the choice of thicker bottom layer with a high thermal conductivity is helpful to protect the polyimide substrate. © 2017, Chinese Lasers Press. All right reserved.
语种	中文
出版者	Science Press
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/114545]
专题	材料科学与工程学院省部共建有色金属先进加工与再利用国家重点实验室
作者单位	1.School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou; Gansu; 730050, China; 2.Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou; Gansu; 730000, China
推荐引用方式 GB/T 7714	Yan, Xiaodong,Ren, Ni,Tang, Fuling,et al. Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide[J]. Zhongguo Jiguang/Chinese Journal of Lasers,2017,44(4).
APA	Yan, Xiaodong.,Ren, Ni.,Tang, Fuling.,Xue, Hongtao.,Zhang, Hongwei.,...&Liu, Xiaoli.(2017).Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide.Zhongguo Jiguang/Chinese Journal of Lasers,44(4).
MLA	Yan, Xiaodong,et al."Numerical Simulation of Movable Nanosecond Pulse Laser Etching of Metal/Polyimide".Zhongguo Jiguang/Chinese Journal of Lasers 44.4(2017).