Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds

doi:10.1088/1361-6439/aaf7de

	Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds
	Han, Xue 1,2; Su, Bo 2; Zhou, Bo 2,3; Wu, Youzhi 1; Meng, Junhu 2
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2019-03
卷号	29 期号:3
关键词	soft lithography ceramics microparts micropatterns PDMS polymer brushes surface-initiated atom transfer radical polymerization (SIATRP)
ISSN号	0960-1317
DOI	10.1088/1361-6439/aaf7de
英文摘要	The soft lithographic fabrication of free-standing ceramic microparts faces two great challenges: filling concentrated suspensions into microcavitics of poly(dimethylsiloxanc) (PDMS) molds completely and demolding green microparts from PDMS molds without any accompanying defects. In this paper, poly (3-sulfopropyl methacrylate potassium salt) (PSPMK) brushes are grafted onto the surfaces of PDMS molds by surface-initiated atom transfer radical polymerization to obtain moisture-sensitive PDMS molds. Application of the PDMS @PSPMK molds for fabricating free-standing, defect-free ceramic microparts is demonstrated by producing alumina microchannel parts with a lateral feature size of 80 mu m from a concentrated aqueous suspension using microtransfer molding. During the molding process, the hydrophilic PSPMK brushes enable the suspension to fill the microcavitics of the PDMS @PSPMK molds completely. During the subsequent drying process, the PSPMK brushes gradually dehydrate and collapse while the suspension loses moisture, which makes demolding easier after complete drying. The moisture-sensitive PDMS@PSPMK molds can be reused more than 10 times for the high-precision fabrication of free-standing ceramic microparts.
资助项目	Student Science and Technology Innovation Project of the Lanzhou University of Technology[KC2018ZR010]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
语种	英语
出版者	IOP PUBLISHING LTD
WOS记录号	WOS:000456068100002
状态	已发表
内容类型	期刊论文
源URL	[http://119.78.100.223/handle/2XXMBERH/32077]
专题	材料科学与工程学院
通讯作者	Wu, Youzhi
作者单位	1.Lanzhou Univ Technol, Sch Mat Sci & Engn, Lanzhou 730050, Gansu, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Gansu, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Han, Xue,Su, Bo,Zhou, Bo,et al. Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2019,29(3).
APA	Han, Xue,Su, Bo,Zhou, Bo,Wu, Youzhi,&Meng, Junhu.(2019).Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,29(3).
MLA	Han, Xue,et al."Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 29.3(2019).