Study on tribological behavior of Al/AlN multilayers

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	Study on tribological behavior of Al/AlN multilayers
	Zhang, Guang-An 3; Wu, Zhi-Guo 2,3; Wang, Ming-Xu 3; Fan, Xiao-Yan 3; Wang, Jun 3; Yan, Peng-Xun 1,3
刊名	Mocaxue Xuebao/Tribology
	2007-05-01
卷号	27 期号:3 页码:204-209
关键词	Aluminum Bond strength (materials) Friction Hardness Magnetron sputtering Nanoindentation Nitrides Wear resistance Aluminum nitride Tribological properties Wear properties
ISSN号	10040595
英文摘要	Al/AlN multilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AlN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AlN multilayers showed obvious enhancement in the Al/AlN layer thickness ratio of 2.9/1.1 compared to the thick AlN layer in modulation period. With the same Al/AlN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness.
语种	中文
出版者	Science Press, 18,Shuangqing Street,Haidian, Beijing, 100085, China
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/112169]
专题	兰州理工大学
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China 2.State Key Laboratory of New Nonferrous Metal Materials, Lanzhou University of Technology, Lanzhou 730050, China; 3.Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 730000, China;
推荐引用方式 GB/T 7714	Zhang, Guang-An,Wu, Zhi-Guo,Wang, Ming-Xu,et al. Study on tribological behavior of Al/AlN multilayers[J]. Mocaxue Xuebao/Tribology,2007,27(3):204-209.
APA	Zhang, Guang-An,Wu, Zhi-Guo,Wang, Ming-Xu,Fan, Xiao-Yan,Wang, Jun,&Yan, Peng-Xun.(2007).Study on tribological behavior of Al/AlN multilayers.Mocaxue Xuebao/Tribology,27(3),204-209.
MLA	Zhang, Guang-An,et al."Study on tribological behavior of Al/AlN multilayers".Mocaxue Xuebao/Tribology 27.3(2007):204-209.