Influence of Charge Carriers Concentration and Mobility on the Gas Sensing Behavior of Tin Dioxide Thin Films

doi:10.3390/coatings9090591

CORC > 兰州理工大学 > 兰州理工大学

	Influence of Charge Carriers Concentration and Mobility on the Gas Sensing Behavior of Tin Dioxide Thin Films
	Li, Ruiwu 1; Zhou, Yanwen 1; Sun, Maolin 1; Gong, Zhen 1; Guo, Yuanyuan 1; Wu, Fayu 1; Li, Weijuan 1; Ding, Wutong 2
刊名	COATINGS
	2019-09
卷号	9 期号:9
关键词	SnO2 film fluorine doped carrier concentration carrier mobility gas response
DOI	10.3390/coatings9090591
英文摘要	In order to investigate function of carrier behavior on gas-sensing properties, tin oxide-based films with different carrier concentration and mobility were obtained, by magnetron sputtering from the powder target, which was followed by further oxygen-management though the annealing treatment. The microstructure, surface morphology, electrical properties and gas sensitivity were characterized by XRD, Raman spectrum, photoluminescence spectrum, atomic force microscope, the hall effect system and electrochemical workstation, respectively. The results showed that all SnO2-based films had a tetragonal rutile phase with (101) preferred orientation. The introduction of fluorine and regulation of oxygen vacancies tuned carrier concentration from 10(15)/cm(3) to 10(21)/cm(3) and mobility from 10(2) cm(2)/V center dot s to 10(-1) cm(2)/V center dot s. The decreasing carrier concentration as well as increasing mobility had a positively important function to improve the sensitivity of SnO2-based films. The air-annealed SnO2 film with lowest carrier concentration had a maximum sensitivity of R = 5.0, while vacuum-annealed SnO2:F film with the highest carrier concentration being the minimum sensitivity. This puts forward a novel reference for the design and application of SnO2-based gas sensing films.
资助项目	Natural Science Foundation of Liaoning Province[20180550802]
WOS研究方向	Materials Science
语种	英语
出版者	MDPI
WOS记录号	WOS:000487973600056
状态	已发表
内容类型	期刊论文
源URL	[http://119.78.100.223/handle/2XXMBERH/31607]
专题	兰州理工大学省部共建有色金属先进加工与再利用国家重点实验室
通讯作者	Wu, Fayu; Li, Weijuan
作者单位	1.Univ Sci & Technol Liaoning, Sch Mat Sci & Met, Anshan 114051, Peoples R China 2.Lanzhou Univ Technol, State Key Lab Adv Proc & Recycling Nonferrous Met, Lanzhou 730050, Gansu, Peoples R China
推荐引用方式 GB/T 7714	Li, Ruiwu,Zhou, Yanwen,Sun, Maolin,et al. Influence of Charge Carriers Concentration and Mobility on the Gas Sensing Behavior of Tin Dioxide Thin Films[J]. COATINGS,2019,9(9).
APA	Li, Ruiwu.,Zhou, Yanwen.,Sun, Maolin.,Gong, Zhen.,Guo, Yuanyuan.,...&Ding, Wutong.(2019).Influence of Charge Carriers Concentration and Mobility on the Gas Sensing Behavior of Tin Dioxide Thin Films.COATINGS,9(9).
MLA	Li, Ruiwu,et al."Influence of Charge Carriers Concentration and Mobility on the Gas Sensing Behavior of Tin Dioxide Thin Films".COATINGS 9.9(2019).