Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film
Shi, Yunyun2,3; Xu, Junqi3; Li, Yang3; Liu, Zheng2; Zhang, Kaifeng1; Su, Junhong3
刊名JOURNAL OF ELECTRONIC MATERIALS
2022-10
卷号51期号:S10页码:5937-5945
关键词Films thermal stress composite beams residual stress
ISSN号0361-5235;1543-186X
DOI10.1007/s11664-022-09819-w
产权排序1
英文摘要

A model of thermal stress in double-layer optical dielectric films on circular substrates was established based on the theory of double-layer composite beams. Here, considering the boundary conditions including force balance and bending moment balance, the distribution of stress and strain in the double-layer film-substrate system was analyzed following equivalence manipulation to determine a detailed formula for calculating the thermal stress in the equivalent film and substrate. The derived formula was not only effective in analyzing the stress and strain of the double-layer film-substrate system but was also applicable for predicting the distribution of thermal stress in the periodic elastic multilayer film-substrate system. According to the actual radius of curvature of the substrate measured via a profilometer before and after the deposition of the HfO2/SiO2 double-layer films, the obtained residual stress of the film was - 79.33 MPa, whereas the thermal stress of the film was calculated to be -52.59 MPa using the theoretical formula. The calculations of the theoretical model were similar to the experimental results when the smaller intrinsic stresses were neglected and the double-layer film was only of nanometer thickness, thus verifying the effectiveness of the double-layer film-substrate model.

语种英语
出版者SPRINGER
WOS记录号WOS:000841061200004
内容类型期刊论文
源URL[http://ir.opt.ac.cn/handle/181661/96118]  
专题先进光学元件试制中心
通讯作者Li, Yang
作者单位1.Lanzhou Inst Phys, Sci & Technol Vacuum Technol & Phys Lab, Lanzhou 730000, Peoples R China
2.Xian Inst Opt & Precis Mech, Adv Opt Mfg Technol Joint Lab, Xian 710119, Peoples R China
3.Xian Technol Univ, Shaanxi Prov Thin Films Technol & Opt Test Open K, Xian 710021, Peoples R China
推荐引用方式
GB/T 7714
Shi, Yunyun,Xu, Junqi,Li, Yang,et al. Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film[J]. JOURNAL OF ELECTRONIC MATERIALS,2022,51(S10):5937-5945.
APA Shi, Yunyun,Xu, Junqi,Li, Yang,Liu, Zheng,Zhang, Kaifeng,&Su, Junhong.(2022).Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film.JOURNAL OF ELECTRONIC MATERIALS,51(S10),5937-5945.
MLA Shi, Yunyun,et al."Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film".JOURNAL OF ELECTRONIC MATERIALS 51.S10(2022):5937-5945.
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