Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film | |
Shi, Yunyun2,3; Xu, Junqi3; Li, Yang3; Liu, Zheng2; Zhang, Kaifeng1; Su, Junhong3 | |
刊名 | JOURNAL OF ELECTRONIC MATERIALS |
2022-10 | |
卷号 | 51期号:S10页码:5937-5945 |
关键词 | Films thermal stress composite beams residual stress |
ISSN号 | 0361-5235;1543-186X |
DOI | 10.1007/s11664-022-09819-w |
产权排序 | 1 |
英文摘要 | A model of thermal stress in double-layer optical dielectric films on circular substrates was established based on the theory of double-layer composite beams. Here, considering the boundary conditions including force balance and bending moment balance, the distribution of stress and strain in the double-layer film-substrate system was analyzed following equivalence manipulation to determine a detailed formula for calculating the thermal stress in the equivalent film and substrate. The derived formula was not only effective in analyzing the stress and strain of the double-layer film-substrate system but was also applicable for predicting the distribution of thermal stress in the periodic elastic multilayer film-substrate system. According to the actual radius of curvature of the substrate measured via a profilometer before and after the deposition of the HfO2/SiO2 double-layer films, the obtained residual stress of the film was - 79.33 MPa, whereas the thermal stress of the film was calculated to be -52.59 MPa using the theoretical formula. The calculations of the theoretical model were similar to the experimental results when the smaller intrinsic stresses were neglected and the double-layer film was only of nanometer thickness, thus verifying the effectiveness of the double-layer film-substrate model. |
语种 | 英语 |
出版者 | SPRINGER |
WOS记录号 | WOS:000841061200004 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/96118] |
专题 | 先进光学元件试制中心 |
通讯作者 | Li, Yang |
作者单位 | 1.Lanzhou Inst Phys, Sci & Technol Vacuum Technol & Phys Lab, Lanzhou 730000, Peoples R China 2.Xian Inst Opt & Precis Mech, Adv Opt Mfg Technol Joint Lab, Xian 710119, Peoples R China 3.Xian Technol Univ, Shaanxi Prov Thin Films Technol & Opt Test Open K, Xian 710021, Peoples R China |
推荐引用方式 GB/T 7714 | Shi, Yunyun,Xu, Junqi,Li, Yang,et al. Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film[J]. JOURNAL OF ELECTRONIC MATERIALS,2022,51(S10):5937-5945. |
APA | Shi, Yunyun,Xu, Junqi,Li, Yang,Liu, Zheng,Zhang, Kaifeng,&Su, Junhong.(2022).Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film.JOURNAL OF ELECTRONIC MATERIALS,51(S10),5937-5945. |
MLA | Shi, Yunyun,et al."Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film".JOURNAL OF ELECTRONIC MATERIALS 51.S10(2022):5937-5945. |
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