Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films
	Zhang GA(张广安); Wang P(王鹏); Zhang JY(张俊彦)
刊名	Materials Science and Engineering A
	2007
卷号	460-461 页码:301-305
关键词	Twin target medium frequency magnetron sputtering CrNx films Deposition rate Structure Wear properties
ISSN号	0921-5093
通讯作者	张俊彦
中文摘要	CrNx films were prepared using 20 kHz medium magnetron frequency magnetron sputtering in order to analyze the structural and mechanical features regarding to N2 content variations. XRD diffraction patterns reveal that only Cr phase with strong [1 1 1] orientation is observed for 0% nitrogen contents, the mixed Cr2N and Cr phases appear at 20% nitrogen content, while for 40% N2 content, no crystal structure feature is seen, indicating that an amorphous phase is generated. Further increasing the nitrogen content to 60% or above, only CrN phase appeared. SEM image shows a columnar-type structure lying in the transition zone between T and I zones of Thornton Model for the films. The critical load (Lc) are 23 and 14 g for the Cr films and CrNx (x > 0) films, respectively. The Cr film (0% N2 content) shows a low friction coefficient against the steel ball, but much higher against the Si3N4 ball. The friction coefficient of the CrNx films is lower in the range of nitrogen content from 20 and 40%, and then reached about 0.7, no obvious changes was observed with the N2 content further increasing.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the “Hundred Talents Program” of Chinese Academy of Sciences;the National Natural Science Foundation of China (Granted Nos.: 50323007;50572108);the Innovative Group Foundation from NSFC(Grant No. 50421502)
语种	英语
WOS记录号	WOS:000246726200043
公开日期	2013-11-01
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/4031]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Zhang JY(张俊彦)
推荐引用方式 GB/T 7714	Zhang GA,Wang P,Zhang JY. Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films[J]. Materials Science and Engineering A,2007,460-461:301-305.
APA	张广安,王鹏,&张俊彦.(2007).Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films.Materials Science and Engineering A,460-461,301-305.
MLA	张广安,et al."Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films".Materials Science and Engineering A 460-461(2007):301-305.