Stress-induced deformation of the coating on large lightweight freeform optics

doi:10.1364/OE.414953

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Stress-induced deformation of the coating on large lightweight freeform optics
	G. Qiao; H. Hu; X. Zhang; X. Luo; D. Xue; G. E. Zhang; H. Hu; L. Yi; Y. U. Yang and W. Deng
刊名	Optics Express
	2021
卷号	29 期号:4 页码:4755-4769
ISSN号	10944087
DOI	10.1364/OE.414953
英文摘要	Large aperture, lightweight optics are frequently utilized in modern optical systems. However, despite the use of advanced techniques for developing their materials, fabrication, and mechanical structure, the coatings placed on the substrates induce slight lattice mismatches and increase the thin film stress on polished surfaces. This significantly distorts nano-accuracy optical surfaces, especially on lightweight freeform surfaces. In this study, we construct a finite element model (FEM) and a ray tracing model to estimate the impact of the stress-induced deformation of the coating on a 1.5m class lightweight silicon carbine (SiC) mirror with a freeform surface. Our simulation results are within 10% deviation from the experimental results, and the deformation texture map matches these results as well. We discuss several possible strategies to overcome stress-induced deformation, including fabrication pre-compensation, lightweight structure redesign, and an inverse print-through effect. 2021 Optical Society of America.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65658]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	G. Qiao,H. Hu,X. Zhang,et al. Stress-induced deformation of the coating on large lightweight freeform optics[J]. Optics Express,2021,29(4):4755-4769.
APA	G. Qiao.,H. Hu.,X. Zhang.,X. Luo.,D. Xue.,...&Y. U. Yang and W. Deng.(2021).Stress-induced deformation of the coating on large lightweight freeform optics.Optics Express,29(4),4755-4769.
MLA	G. Qiao,et al."Stress-induced deformation of the coating on large lightweight freeform optics".Optics Express 29.4(2021):4755-4769.