Design and fabrication of robust broadband extreme ultraviolet multilayers

doi:10.1063/1.5057714

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Design and fabrication of robust broadband extreme ultraviolet multilayers
	S.Q.Kuang; J.B.Wang; H.G.Yang; T.L.Huo; H.J.Zhou
刊名	Aip Advances
	2019
卷号	9 期号:4 页码:5
关键词	mirrors,Science & Technology - Other Topics,Materials Science,Physics
DOI	10.1063/1.5057714
英文摘要	The robust designs of broadband extreme ultraviolet multilayers based on the multiobjective genetic algorithm are validated experimentally. In order to reduce the influence of random layer thickness fluctuations on the great deformation of the experimental reflection of extreme ultraviolet multilayer with a wide angular band, the multiobjective genetic algorithm has been improved to optimize the multilayer system composed by the layer thicknesses which can be controlled precisely. The robust designs of broadband Mo/Si multilayers were fabricated, and the experimental results were presented and analyzed, and then the advantage of robust multilayer designs was demonstrated. (C) 2019 Author(s).
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/63284]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S.Q.Kuang,J.B.Wang,H.G.Yang,et al. Design and fabrication of robust broadband extreme ultraviolet multilayers[J]. Aip Advances,2019,9(4):5.
APA	S.Q.Kuang,J.B.Wang,H.G.Yang,T.L.Huo,&H.J.Zhou.(2019).Design and fabrication of robust broadband extreme ultraviolet multilayers.Aip Advances,9(4),5.
MLA	S.Q.Kuang,et al."Design and fabrication of robust broadband extreme ultraviolet multilayers".Aip Advances 9.4(2019):5.