48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs

doi:10.1364/AO.58.008383

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs
	Y.Li; J.Tao; Y.Zhao; J.Wang; J.Lv; Y.Qin; J.Liang; W.Wang
刊名	Applied Optics
	2019
卷号	58 期号:31 页码:8383-8389
关键词	Light emitting diodes,Color,Etching,Flip chip devices,Pixels,Substrates
ISSN号	1559128X
DOI	10.1364/AO.58.008383
英文摘要	This paper reports on the design and fabrication of a 48 48 full-color pixelated addressable light-emitting diode on silicon (LEDoS) micro display. The metallization pattern was designed and fabricated on a silicon substrate, while red, green, and blue monochromatic micro LEDs were integrated on the silicon substrate using transfer printing. The red, green, and blue micro LEDs are flip-chip structures in which red micro LEDs were fabricated using substrate transfer, mesa etching, metal deposition, and chip dicing. The integration process does not require wire bonding, which reduces the full-color pixel size and increases the integration speed. The LEDoS micro display can be addressed individually for each LED pixel and display representative patterns. 2019 Optical Society of America.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/63236]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.Li,J.Tao,Y.Zhao,et al. 48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs[J]. Applied Optics,2019,58(31):8383-8389.
APA	Y.Li.,J.Tao.,Y.Zhao.,J.Wang.,J.Lv.,...&W.Wang.(2019).48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs.Applied Optics,58(31),8383-8389.
MLA	Y.Li,et al."48 48 pixelated addressable full-color micro display based on flip-chip micro LEDs".Applied Optics 58.31(2019):8383-8389.