Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles

doi:10.1364/oe.27.019448

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles
	X.T.Mi; S.W.Zhang; X.D.Qi; H.L.Yu; H.Z.Yu; Y.G.Tang
刊名	Optics Express
	2019
卷号	27 期号:14 页码:19448-19462
关键词	high-energy,error,spectrometer,fabrication,efficiency,mirror,Optics
ISSN号	1094-4087
DOI	10.1364/oe.27.019448
英文摘要	A concept for position adjustment of the diamond in a ruling engine to enable nanoscale groove positioning is proposed. Based on this concept, we fabricate a diamond carriage, design an optical path, and propose an appropriate control method. Several high-quality gratings are ruled for spectrometer or interferometer applications. After implementation of the improvements, the maximum intensity of ghosts and scattered light of the echelle grating with 79 grooves/mm is reduced to half of that before the improvement, and the highest achievable groove density is increased from 6000 grooves/mm to 8000 grooves/mm. The grating ruling results indicate that the proposed concept and the related improvements to the engine significantly improve the accuracy of the CIOMP-6 ruling engine. (c) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/63136]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X.T.Mi,S.W.Zhang,X.D.Qi,et al. Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles[J]. Optics Express,2019,27(14):19448-19462.
APA	X.T.Mi,S.W.Zhang,X.D.Qi,H.L.Yu,H.Z.Yu,&Y.G.Tang.(2019).Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles.Optics Express,27(14),19448-19462.
MLA	X.T.Mi,et al."Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles".Optics Express 27.14(2019):19448-19462.