Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect

doi:10.1016/j.snb.2019.126732

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect
	M.Q.Pi; C.T.Zheng; R.Bi; H.Zhao; L.Liang; Y.Zhang; Y.D.Wang
刊名	Sensors and Actuators B-Chemical
	2019
卷号	297 页码:11
关键词	Waveguide sensor,Suspended chalcogenide/silica-on-silicon,slot-waveguide,Gas sensor,Mid-infrared absorption spectroscopy,absorption-spectroscopy,methane sensor,mu-m,laser,dispersion,nanowires,Chemistry,Electrochemistry,Instruments & Instrumentation
DOI	10.1016/j.snb.2019.126732
英文摘要	The reported chalcogenide (ChG) waveguide sensor mainly focuses on rectangular waveguide with a small evanescent field for light-gas interaction. In order to improve the sensing performance in the mid-infrared spectral range and ease wavguide fabrication, a suspended ChG/silica-on-silicon slot-waveguide gas sensor was proposed, where ChG was used as the core layer, silica was adopted as the lower buffer as well as a support layer with the silica under the waveguide core removed. The new sensor structure resulted in an increased light-gas interaction, a decreased waveguide loss in the mid-infrared and a small depth-to-width ratio for feasible slot fabrication. The optimized suspended slot waveguide reveals a large power confinement factor (PCF) of 85.77% at 3291 nm. CH4 was adopted as the target gas for performance evaluation of the ChG/silica-on-silicon slot-waveguide sensor at the absorption line of 3038.5 cm(-1). An optimal waveguide length of 1.45 cm was determined with a waveguide loss of 3 dB/cm for maximizing the sensitivity. The response time is as short as < 3 mu s due to the exposure of the waveguide sensing area to the atmosphere. The limit of detection (LoD) was decided to be 1.70 parts-per-million (ppm) for a minimum detectable signal-to-noise ratio of 10. Effects of ambient temperature/pressure change and fabrication error on the sensor performance were discussed. The proposed suspended ChG/silica-on-silicon slot-waveguide sensor possesses a similar to 10 times larger PCF than other reported ChG rectangular waveguide sensors in the mid-infrared and reveals an improved performance for potential environmental monitoring and wearable gas sensing applications.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/63117]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M.Q.Pi,C.T.Zheng,R.Bi,et al. Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect[J]. Sensors and Actuators B-Chemical,2019,297:11.
APA	M.Q.Pi.,C.T.Zheng.,R.Bi.,H.Zhao.,L.Liang.,...&Y.D.Wang.(2019).Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect.Sensors and Actuators B-Chemical,297,11.
MLA	M.Q.Pi,et al."Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect".Sensors and Actuators B-Chemical 297(2019):11.